Morikawa, Y. ; Totsu, Y. ; Nishiguchi, M. ; Hoga, M. ; Hayashi, N. ; Pang, L. ; Luk-Pat, G.T.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.922-934, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Pang, L. ; Yu, Z. ; Luk-Pat, G.T. ; Chen, J.X. ; Volk, W.W.
Pub. info.:
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.947-954, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ohira, K. ; Chung, D.H.P. ; Nobuyuki, Y. ; Tateno, M. ; Matsumura, K. ; Chen, J.-H. ; Luk-Pat, G.T. ; Fukui, N. ; Tanaka, Y.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XI. pp.364-374, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering