1.

Conference Proceedings
Conference Proceedings
1. Inverse Electromagnetic Impedance Problem Using the Delayed Time-Domain Boundary Integral Method
Terrasse, I. ; Ludwig, B. ; Alestra, S. ; Duceau, E.
Pub. info.: AP 2000 : millennium Conference on Antennas & Propagation, Davos, Switzerland, 9-14 April 2000.  2000.  Noordwijk, Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 444
2.

Conference Proceedings
Conference Proceedings
2. Full-level alternating PSM for sub-100nm DRAM gate patterning
Pforr, R. ; Ahrens, M. ; Dettmann, W. ; Hennig, M. ; Koehle, R. ; Ludwig, B. ; Morgana, N. ; Thiele, J.
Pub. info.: Optical Microlithography XVI.  Part One  pp.232-243,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
3.

Conference Proceedings
Conference Proceedings
3. Introduction of full-level alternating phase-shift mask technology into IC manufacturing
Thiele, J. ; Ahrens, M. ; Dettmann, W. ; Heissmeier, M. ; Hennig, M. ; Ludwig, B. ; Moukara, M. ; Pforr, R.
Pub. info.: Optical Microlithography XV.  Part One  pp.89-97,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691