Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.383-391, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.629-637, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the 16th International Modal Analysis Conference February 2-5, 1998 Fess Parker's Doubletree Resort Santa Barbara, California. Part2 pp.1054-1060, 1998. Bethel, CT. Society for Experimental Mechanics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the 16th International Modal Analysis Conference February 2-5, 1998 Fess Parker's Doubletree Resort Santa Barbara, California. Part2 pp.1061-1067, 1998. Bethel, CT. Society for Experimental Mechanics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.612-620, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.621-628, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.559-567, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.261-274, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part2 pp.768-778, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California. Part1 pp.128-139, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering