Philit, G. ; von Aswege, L. ; Madore, M. ; Wolke, K. ; Clech, M.-C. ; Asselin-Degrange, E. ; Chabli, A. ; Louis, D.
Pub. info.:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.356-361, 2003. Pennington, NJ. Electrochemical Society
Kalinowski, I.J. ; Bourlot, C. ; Marfoure, A. ; Louveau, O. ; Li, S. ; Su, J. ; Hills, G.W. ; Louis, D.
Pub. info.:
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.216-223, 2003. Pennington, N.J.. Electrochemical Society