Huang, W. C. ; Lai, C. M. ; Luo, B. ; Tsai, C. K. ; Tsay, C. S. ; Lai, C. W. ; Kuo, C. C. ; Liu, R. G. ; Lin, H. T. ; Lin, B. J.
Pub. info.:
Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.543-554, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering