MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA. pp.163-170, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK. pp.295-303, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
EUV, x-ray, and gamma-ray instrumentation for astronomy X : 21-23 July 1999 Denver, Colorado. pp.82-93, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California. pp.422-431, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
X-ray, and gamma-ray instrumentation for astronomy XI : 2-4 August 2000 San Diego, USA. pp.367-375, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
X-ray, and gamma-ray instrumentation for astronomy XI : 2-4 August 2000 San Diego, USA. pp.419-427, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
MOEMS and miniaturized systems : 18-20 September 2000, Santa Clara, USA. pp.51-58, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.192-203, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering