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Conference Proceedings

1. Rapid x-ray reflectivity (XRR) characterization and process monitoring of multilayer Ta/Al2O3/Ta/SiO2/Si

Leng,J. ; Opsal,J.L.

Pub. info.:	Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA. pp.244-252, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4449

Conference Proceedings

2. Vibration measurement of smart composite structures using a new intensity-modulated optical fiber sensor

Leng,J. ; Asundi,A.K. ; Du,S. ; Wang,D.

Pub. info.:	Fiber optic and laser sensors and applications : including Distributed and multiplexed fiber optic sensors VII : 3-5 November 1998, Boston, Massachusetts. pp.110-115, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3541

Conference Proceedings

3. Rotating compensator spectroscopic ellipsometry (RCSE) and its application to high-k dielectric film HfO2

Leng,J. ; Li,S. ; Opsal,J.L. ; Aspnes,D.E. ; Lee,B.H. ; Lee,J.C.

Pub. info.:	Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA. pp.228-234, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4099

Conference Proceedings

4. Fiber optic vibration sensor-based smart civil structures

Leng,J. ; Asundi,A.K.

Pub. info.:	Advanced photonic sensors and applications : 30 November-3 December 1999, Singapore. pp.505-510, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3897