Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.349-354, 2001. Pennington, N.J.. Electrochemical Society
Kim, Y.W. ; Kim, I.K. ; Lee, N.I. ; Ko, J.W. ; Ahn, S.T. ; Lee, M.Y. ; Lee, J.G.
Pub. info.:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.599-602, 1993. Pittsburgh, Pa.. Materials Research Society