1.

Conference Proceedings
Conference Proceedings
1. THE REACTION OF OZONE AND H2O2 IN AMMONIUM HYDROXIDE (NH4OH) SOLUTIONS AND THEIR REACTION WITH SILICON WAFERS
Eom, Dae-Hong ; Kim, Sang-Yong ; Lee, Kang-Kuk ; Kim, Ki-Sub ; Song, Hyung-Soo ; Park, Jin-Goo
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.288-295,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry
Lee, Kang-Kuk ; Park, Jin-Goo ; Shin, Hyung-Jae
Pub. info.: Optical microstructural characterization of semiconductors : sympoisum held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.297-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 588