Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

12 results

Conference Proceedings

1. COP Induced Isolation Failures in Cz Wafers

Lee, G.S. ; Kwack, K.D. ; Park, J.G. ; Park, J.M. ; Shim, T.H.

Pub. info.:	ULSI process integration : proceedings of the first international symposium. pp.255-266, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-18

Conference Proceedings

2. Thermal Stability of Sputtered Ta/PECVD SiOF Films for Intermetal Dielectric Applications

Kim, K. ; Park, S. ; Lee, G.S.

Pub. info.:	Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability. pp.165-169, 1998. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-6

Conference Proceedings

3. Conversion of Demilitarized Explosives and Propellants to Higher Value Products

Mitchell, A.R. ; Coburn, M.D. ; Schmidt, R.D. ; Pagoria, P.F. ; Lee, G.S.

Pub. info.:	Application of demilitarized gun and rocket propellants in commercial explosives. pp.49-58, 2000. Dordrecht. Kluwer Academic Publishers
Title of ser.:	NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:	3

Conference Proceedings

4. Effect of Crystal Defects Such as COPs, Large Dislocations, and OSF Ring on Device Integrity Degradation

Park, J.G. ; Lee, G.S. ; Park, J.M. ; Chon, S.M. ; Chung, H.K.

Pub. info.:	Proceedings of the Third International Symposium on Defects in Silicon. pp.324-341, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-1

Conference Proceedings

5. Effect of High Temperature RTA on Precipitate Formation and the COP Dissolution

Park, J.G. ; Park, H.P. ; Lee, G.S. ; Kwack, K.D. ; Ryu, K.B. ; Park, J.M.

Pub. info.:	ULSI process integration : proceedings of the first international symposium. pp.157-166, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-18

Conference Proceedings

6. Effect of crystal defects on device characteristics

Park, J.G. ; Park, J.M. ; Cho, K.C. ; Lee, G.S. ; Chung, H.K.

Pub. info.:	Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.173-195, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-22

Conference Proceedings

7. Single element photoconductive Hg0.79Cd0.21Te IR detector fabrications and their characteristics

Kim, T.H. ; Han, M.S. ; Jeoung, M.S. ; Kwon, J.H. ; Yim, N.S. ; Lee, G.S. ; Kim, E.T. ; Hahn, S.R. ; Kwon, H.C. ; Bin, Y. ; Jeoung, Y.T. ; Kim, J.M.

Pub. info.:	Infrared technology and applications XXIV : 19-24 July 1998, San Diego, California. Part 1 pp.91-97, 1998. Bellingham, Wash., USA. SPIE
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3436

Conference Proceedings

8. Amine gradient process for 157-nm lithography

Jung, J.-C. ; Kong, K.-K. ; Hwang, Y.-S. ; Park, K.-D. ; Lee, S.-K. ; Lee, G.S. ; Kim, J.S. ; Shin, K.-S.

Pub. info.:	Advances in Resist Technology and Processing XIX. Part One pp.212-220, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4690

Conference Proceedings

9. Advances in TFE-based fluoropolymers for 157-nm lithography: a progress report

Sharif, I. ; DesMarteau, D. ; Ford, L. ; Shafer, G.J. ; Thomas, B. ; Conley, W. ; Zimmerman, P. ; Miller, D. ; Lee, G.S. ; Chambers, C.R. ; Trinque, B.C. ; Chiba, T. ; Osborn, B.P. ; Willson, C.G.

Pub. info.:	Advances in Resist Technology and Processing XX. 1 pp.33-42, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5039

10.

Conference Proceedings

10. Imaging and photochemistry studies of fluoropolymers for 193-nm lithography

Conley, W. ; Zimmerman, P. ; Miller, D. ; Lee, G.S.

Pub. info.:	Advances in Resist Technology and Processing XX. 1 pp.207-212, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5039

12 results

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

Filtering by:

Author: Lee, G.S.