1.

Conference Proceedings
Conference Proceedings
1. 25 nm immersion lithography at 193 nm wavelength
Choi, S.-H. ; Park, T.-H. ; Kim, E. ; Youn, H.-J. ; Lee, D.-Y. ; Ban, Y.-C. ; Je, A.-Y. ; Kim, D.-H. ; Hong, J.-S. ; Kim, Y.-H. ; Yoo, M.-H. ; Kong, J.-T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.141-147,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. First microprocessors with immersion lithography
Lee, D.-Y. ; Kim, I.-S. ; Jung, S.-G. ; Jung, M.-H. ; Park, J.-O. ; Oh, S.-H. ; Woo, S.-G. ; Cho, H.-K. ; Moon, J.-T.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.119-128,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings
Conference Proceedings
3. Down conversion of high-energy photons in anatase-based TiO2 solar cells
Kim, H.-J. ; Song, J.S. ; Koo, B.-K. ; Lee, D.-Y. ; Lee, W.-J. ; Koh, J.-H.
Pub. info.: Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia.  pp.507-514,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5276
4.

Conference Proceedings
Conference Proceedings
4. Challenge for effective OCV control in 90-nm logic gate using ArF lithography
Kang, H.-J. ; Lee, S.-W. ; Lee, D.-Y. ; Yeo, G.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.1194-1201,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
5.

Conference Proceedings
Conference Proceedings
5. A visual servoing method for high-precision chip mounting technology
Lee, D.-Y. ; Jang, K.-N. ; Cho, H. S.
Pub. info.: Optomechatronic Systems IV.  pp.295-305,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5264
6.

Conference Proceedings
Conference Proceedings
6. Assessments on process parameters' influences to the proximity correction
Lee, E.-M. ; Lee, S.-W. ; Lee, D.-Y. ; Choi, S.-H. ; Park, J.-O. ; Jung, S.-G. ; Yeo, G.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.287-295,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375