1.

Conference Proceedings
Conference Proceedings
1. Investigation of The Electronic Properties of Thin Dielectric Films by Scanning Probe Microscopy
Antonov, D. A. ; Filatov, D. O. ; Kruglov, A. V. ; Maximov, G. A. ; Zenkevich, A. V. ; Lebedinskii, Y.
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.471-480,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. XPS/LEIS Study of High-k Rare Earth (Lu, Yb) Oxides Silicates on Si; The Effect of Annealing on Microstructure Evolution
Zenkevich, A. ; Lebedinskii, Y. ; Scarel, G ; Fanciulli, M
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.147-161,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
3.

Conference Proceedings
Conference Proceedings
3. Precursor combinations for ALD of rare earth oxides and silicates-A quantum chemical and x-ray study
Elliott, S. D. ; Scarel, G. ; Wiemer, C. ; Fanciulli, M. ; Lebedinskii, Y. ; Zenkevich, A. ; Fedushkin, I. L.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.605-613,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09