Lercel, M.J. ; Fisch, E. ; Racette, K.C. ; Lawliss, M. ; Williams, C. T. ; Kindt, L. ; Huang, C.
Pub. info.:
18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.18-22, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
22nd Annual BACUS Symposium on Photomask Technology. Part Two pp.1133-1142, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Lercel, M.J. ; Williams, C.T. ; Lawliss, M. ; Ackel, R. ; Kindt, L. ; Fisch, E.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology IX. pp.790-798, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering