1.

Conference Proceedings
Conference Proceedings
1. SURFACE ANALYSIS OF CLUSTERED DRY CLEANING OF RESIDUE FROM AN ICP OXIDE ETCH
Lawing, A. ; Han, Y.-P. ; Sawin, H.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.431-438,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35
2.

Conference Proceedings
Conference Proceedings
2. THE MECHANISM OF COPPER REMOVAL FROM A BARE SILICON SURFACES WITH ULTRAVIOLET EXCITED CHLORINE
Lawing, A. ; Sawin, H. ; Fayfield, T.
Pub. info.: Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.299-306,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-35