1.

Conference Proceedings
Conference Proceedings
1. Determination of mask induced polarization effects occurring in hyper NA immersion lithography
Huang, W. C. ; Lai, C. M. ; Luo, B. ; Tsai, C. K. ; Tsay, C. S. ; Lai, C. W. ; Kuo, C. C. ; Liu, R. G. ; Lin, H. T. ; Lin, B. J.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.543-554,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Intelligent model-based OPC [6154-121]
Huang, W. C. ; Lai, C. M. ; Luo, B. ; Tsai, C. K ; Chin, M. H. ; Lai, C. W. ; Kuo, C. C. ; Liu, R. G. ; Lin, H. T.
Pub. info.: Optical Microlithography XIX.  pp.615436-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154