1.

Conference Proceedings
Conference Proceedings
1. Micromachined aperture probe tip for multifunctional scanning probe microscopy
Abraham,M. ; Ehrfeld,W. ; Lacher,M. ; Marti,O. ; Mayr,K. ; Noell,W. ; Guthner,P. ; Barenz,J.
Pub. info.: Micro-optical technologies for measurement, sensors, and microsystems II and Optical fiber sensor technologies and applications : 18-20 June 1997, Munich, FRG.  Part 1  pp.248-256,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3099
2.

Conference Proceedings
Conference Proceedings
2. Novel Concepts and Technologies for Manufacturing Optical Microdevices (Invited Paper)
Ehrfeld,W. ; Bauer,H.-D. ; Drews,D. ; Lacher,M.
Pub. info.: OPTIKA '98, 14-17 September 1998, Budapest, Hungary.  pp.442-450,  1998.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3573
3.

Conference Proceedings
Conference Proceedings
3. Micromolding:a powerful tool for large-scale production of precise microstructures
Weber,L. ; Ehrfeld,W. ; Freimuth,H. ; Lacher,M. ; Lehr,H. ; Pech,B.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.156-167,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
4.

Conference Proceedings
Conference Proceedings
4. Micromachined aperture probe tip for multifunctional scanning probe microscopy
Abraham,M. ; Ehrfeld,W. ; Lacher,M. ; Mayr,K. ; Noel,W. ; Guthner,P. ; Barenz,J.
Pub. info.: Micromachining and Imaging.  pp.34-42,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3009
5.

Conference Proceedings
Conference Proceedings
5. Micromachined aperture probe for combined atomic force and near-field scanning optical microscopy (AFM/NSOM)
Drews,D. ; Noell,W. ; Ehrfeld,W. ; Lacher,M. ; Mayr,K. ; Marti,O. ; Serwatzy,C. ; Abraham,M.
Pub. info.: Materials and Device Characterization in Micromachining.  pp.76-83,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3512