1.

Conference Proceedings
Conference Proceedings
1. GROWTH OF THIN EPITAXIAL SILICON LAYERS ON HEAVILY DOPED SUBSTRATES BY TRP-CVD
Lee, S. K. ; Ku, Y. H. ; Kwong, D. L.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.127-132,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
2.

Conference Proceedings
Conference Proceedings
2. A SELF-ALIGNED SILICIDE TECHNOLIGY USING ION-BEAM MIXING, DOPED SILICIDE AND RAPID THERMAL PROCESSING
Ku, Y. H. ; Lee, S. K. ; Kwong, D. L. ; Chu, P.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.249-254,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
3.

Conference Proceedings
Conference Proceedings
3. REACTION KINETICS OF SPUTTER-DEPOSITED Ti ON Si02 SUBSTRATES DURING RAPID THERMAL ANNEALING
Yun, E. J. ; Chun, H. G. ; Jung, K. ; Kwong, D. L. ; Lee, S.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.255-260,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
4.

Conference Proceedings
Conference Proceedings
4. *RAPID THERMAL PROCESSING:FOR SELF-ALIGNED SILICIDE TECHNOLOGY
Ku, Y. H. ; Lee, S. K. ; Louis, E., ; Shih, D. K. ; Kwong, D. L.
Pub. info.: Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A..  pp.155-164,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 92
5.

Conference Proceedings
Conference Proceedings
5. IMPACT OF OXYGEN DURING POST-GATE PROCESSING ON MOS DEVICE CHARACTERISTICS
Lee, Steven S. ; Lo, G. Q. ; Kwong, D. L.
Pub. info.: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.253-258,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 225
6.

Conference Proceedings
Conference Proceedings
6. PERFORMANCE AND REALIABILITY OF ULTATHIN OXYNITRIDE GATE DIELECTRICS PREPARED USING IN-SITU MULTIPLE RAPID THERMAL PROCESSING
Lo, G. Q. ; Shih, d. K. ; Ting W. ; Kwong, D. L.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.313-318,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
7.

Conference Proceedings
Conference Proceedings
7. FORMATION OF ULTRATHIN STACKED DIELECTRICS PRREPARED BY IN-SITU MULTI-STEP RTP-CVD
Ting, W. ; Lin, S. N. ; Kwong, D. L.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.351-358,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
8.

Conference Proceedings
Conference Proceedings
8. DEFECTS AND STRAIN IN GeXSi1-X/Si LAYERS GROWN BY RAPID THERMAL PROCESSING CHEMCIAL VAPOR DEPOSITION
Jung, K. H. ; Kim, Y. M. ; Chun, H. G. ; Kwong, D. L. ; Rabenberg, L.
Pub. info.: Chemistry and defects in semiconductor heterostructures.  pp.335-340,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 148
9.

Conference Proceedings
Conference Proceedings
9. ANOMALOUS TRANSIENT DIFFUSION OF ION IMPLANTED BORON DURING RAPID THERMAL ANNEALING
Kim, Y. N. ; Lo, G. Q. ; Kwong, D. L. ; Tseng, H. H. ; Hance, R.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.391-398,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
10.

Conference Proceedings
Conference Proceedings
10. RAPID THERMAL ANNEALING OF COMPOSITE TaSi2/n+ POLY-Si SILICIDE FILMS
Kwong, D. L. ; Kwor, R. ; Tsaur, B-Y. ; Daneshvar, K.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.733-738,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23