1.

Conference Proceedings
Conference Proceedings
1. Evaluation of micromechanical reliability of microactuator materials for hard-disk drive using the electrostatic test structure
Lee,S.-H. ; Pak,Y. ; Kwon,D.
Pub. info.: MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California.  pp.59-66,  1999.  Bellingham, Washington.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3880
2.

Conference Proceedings
Conference Proceedings
2. Diagnosis of microcrack initiation and estimation frac-ture toughness for micromachined silicon comb device with prenotch actuated by electrostatic force
Lee,S.-H. ; Kim,J.S. ; Pak,Y.E. ; Jeon,J.-U. ; Kwon,D.
Pub. info.: MEMS Reliability for Critical Applications.  pp.133-144,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4180
3.

Conference Proceedings
Conference Proceedings
3. Micromechanical reliability evaluation of mirror devices through applying accelerated electrostatic force
Park,B. ; Bu,J. ; Kwon,D.
Pub. info.: Miniaturized Systems with Micro-Optics and MEMS.  pp.101-111,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3878