Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA. pp.54-61, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.411-417, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hirai, T. ; Fuse, K. ; Kurisu, K. ; Ebata, K. ; Matsushima, K.
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Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.378-383, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kurisu, K. ; Hirai, T. ; Ushiro, T. ; Fuse, K. ; Okada, T. ; Ebata, K.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.313-318, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering