1.

Conference Proceedings
Conference Proceedings
1. Advanced mix-and-match using a high-NA i-line scanner
Kuijten,J.P. ; Harris,T.A. ; Heijden,L.van der ; Witko,D. ; Cossins,J. ; Foster,J. ; Ritchie,D.R.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.843-856,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Reticle contributions to CD uniformity for 0.25-ｦﾌm DUV lithography
Kuijten,J.P. ; Duray,F. ; der,Kinderen,T.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.620-628,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
3.

Conference Proceedings
Conference Proceedings
3. Trench warfare!: fitting photons for fine-feature fabrication
Kuijten,J.P. ; Conley,W. ; Socha,R.J. ; Goor,S.van de ; Hsu,S. ; Smith,D. ; Oliveras,M. ; Strozenski,K.
Pub. info.: Optical Microlithography XIV.  4346  pp.1058-1065,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346