1.

Conference Proceedings
Conference Proceedings
1. Initial results from the EUV engineering test stand
Tichenor,D.A. ; Ray-Chaudhuri,A.K. ; Lee,S.H. ; Chapman,H.N. ; Replogle,W.C. ; Berger,K.W. ; Stulen,R.H. ; Kubiak,G.D. ; Klebanoff,L.E. ; Wronosky,J.B. ; O'Connell,D.J. ; Leung,A.H. ; Jefferson,K.L. ; Ballard,W.P. ; Hale,L.C. ; Blaedel,K.L. ; Taylor,J.S. ; Folta,J.A. ; Spiller,E.A. ; Soufli,R.
Pub. info.: Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA.  pp.9-18,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4506
2.

Conference Proceedings
Conference Proceedings
2. Development of a high-average-power extreme-ultraviolet electric capillary discharge source
Fornaciari,N.R. ; Bender,H. ; Buchenauer,D. ; Kanouff,M.P. ; Karim,S. ; Kubiak,G.D. ; Moen,C.D. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewart,K.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.226-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
3.

Conference Proceedings
Conference Proceedings
3. System integration and performance of the EUV engineering test stand
Tichenor,D.A. ; Ray-Chaudhuri,A.K. ; Replogle,W.C. ; Stulen,R.H. ; Kubiak,G.D. ; Rockett,P.D. ; Klebanoff,L.E. ; Jefferson,K.J. ; Leung,A.H. ; Wronosky,J.B. ; Hale,L.C. ; Chapman,H.N. ; Taylor,J.S. ; Folta,J.A. ; Tichenor,D.A. ; Soufli,R. ; Spiller,E.A. ; Blaedel,K.L. ; Sommargren,G.E. ; Sweeney,D.W.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.19-37,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
4.

Conference Proceedings
Conference Proceedings
4. Recent advances in the Sandia EUV 10x microstepper (Invited Paper)
Goldsmith,J.E.M. ; Wronosky,J.B. ; Barr,P.K. ; Berger,K.W. ; Bernardez II,L.J. ; Cardinale,G.F. ; Darnold,J.R. ; Folk,D.R. ; Haney,S.J. ; Henderson,C.C. ; Jefferson,K.L. ; Krenz,K.D. ; Kubiak,G.D. ; Nissen,R.P. ; O'Connell,D.J. ; Perras,Y.E. ; Ray-Chaudhuri,A.K. ; Smith,T.G. ; Stulen,R.H. ; Tichenor,D.A. ; Ver Berkmoes,A.A.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.11-19,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
5.

Conference Proceedings
Conference Proceedings
5. High-power extreme-ultraviolet source based on gas jets
Kubiak,G.D. ; Bernardez II,L.J. ; Krenz,K.D.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.81-89,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
6.

Conference Proceedings
Conference Proceedings
6. High-power source and illumination system for extreme ultraviolet lithography
Kubiak,G.D. ; Bernardez,L.J. ; Krenz,K D. ; Replogle,W.C. ; Sweatt,W.C. ; Sweeney,D.W. ; Hudyma,R.M. ; Shields,H.
Pub. info.: EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado.  pp.136-142,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3767
7.

Conference Proceedings
Conference Proceedings
7. Scale-up of a cluster jet laser plasma source for extreme ultraviolet lithography
Kubiak,G.D. ; Bernardez,L.J. ; Krenz,K.D. ; Sweatt,W.C.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.669-678,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
8.

Conference Proceedings
Conference Proceedings
8. Development of an electric capillary discharge source
Fornaciari,N.R. ; Chang,J.J. ; Folk,D.R. ; Gianoulakis,S.E. ; Goldsmith,J.E.M. ; Kubiak,G.D. ; Long,B.C. ; O'Connell,D.J. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewartka,K.D.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.120-125,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
9.

Conference Proceedings
Conference Proceedings
9. EUV engineering test stand
Tkhenor,D.A. ; Kubiak,G.D. ; Replogle,W.C. ; Klebanoff,L.E. ; Wronosky,J.B. ; Hale,L.C. ; Chapman,H.N. ; Taylor,J.S. ; Folta,J.A. ; Montcalm,C. ; Hudyma,R.M. ; Goldberg,K.A. ; Naulleau,P.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.48-69,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
10.

Conference Proceedings
Conference Proceedings
10. EUV absorption in a laser-produced plasma source
Kanouff,M.P. ; Shields,H. ; Bernardez,L.J. ; Kubiak,G.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.507-514,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343