1.

Conference Proceedings
Conference Proceedings
1. Recent advances in the Sandia EUV 10x microstepper (Invited Paper)
Goldsmith,J.E.M. ; Wronosky,J.B. ; Barr,P.K. ; Berger,K.W. ; Bernardez II,L.J. ; Cardinale,G.F. ; Darnold,J.R. ; Folk,D.R. ; Haney,S.J. ; Henderson,C.C. ; Jefferson,K.L. ; Krenz,K.D. ; Kubiak,G.D. ; Nissen,R.P. ; O'Connell,D.J. ; Perras,Y.E. ; Ray-Chaudhuri,A.K. ; Smith,T.G. ; Stulen,R.H. ; Tichenor,D.A. ; Ver Berkmoes,A.A.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.11-19,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
2.

Conference Proceedings
Conference Proceedings
2. High-power extreme-ultraviolet source based on gas jets
Kubiak,G.D. ; Bernardez II,L.J. ; Krenz,K.D.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.81-89,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
3.

Conference Proceedings
Conference Proceedings
3. Mass-producible microholographic tags
Sweatt,W.C. ; Descour,M.R. ; Ray-Chaudhuri,A.K. ; Kravitz,S.H. ; Warren,M.E. ; Stulen,R.H. ; Tichenor,D.A. ; Underwood,J.H. ; Krenz,K.D.
Pub. info.: Diffractive and holographic optics technology III : 1-2 February, 1996, San Jose, California.  pp.170-174,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2689
4.

Conference Proceedings
Conference Proceedings
4. Measurement of mid-spatial-frequency scatter in extreme ultraviolet lithography systems using direct aerial image measurements
Fields,C.H. ; Ray-Chaudhuri,A.K. ; Krenz,K.D. ; Oldham,W.G. ; Stulen,R.H.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.356-367,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
5.

Conference Proceedings
Conference Proceedings
5. Scale-up of a cluster jet laser plasma source for extreme ultraviolet lithography
Kubiak,G.D. ; Bernardez,L.J. ; Krenz,K.D. ; Sweatt,W.C.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.669-678,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
6.

Conference Proceedings
Conference Proceedings
6. Mass-producible microtags for security applications:Tolerance analysis by rigorous coupled-wave analysis
Descour,M.R. ; Sweatt,W.C. ; Ray-Chaudhuri,A.K. ; Krenz,K.D. ; Tichenor,D.A. ; Stulen,R.H.
Pub. info.: Micromachining and Imaging.  pp.15-24,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3009