Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.:
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.. pp.17-26, 1987. Pittsburgh, Pa.. Materials Research Society
Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.:
Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.. pp.39-48, 1987. Pittsburgh, Pa.. Materials Research Society