1.

Conference Proceedings
Conference Proceedings
1. Non-Contact Characterization of Ultrathin Dielectrics for the Gigabit Era*
Roy,P.K. ; Chacon,C. ; Ma,Y. ; Kizilyalli,I.C. ; Horner,G.S. ; Verkuil,R.L. ; Miller,T.G.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.280-294,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3322
2.

Conference Proceedings
Conference Proceedings
2. Alignment mark detection in CMOS materials with SCALPEL e-beam lithography
Farrow,R.C. ; Waskiewicz,W.K. ; Kizilyalli,I.C. ; Callatin,G.M. ; Liddle,J.A. ; Mkrtchyan,M.M. ; Kornblit,A. ; Ocola,L.E. ; Klemens,F.P. ; Felker,J.A. ; Biddick,C.J. ; Kraus,J.S. ; Blakey,M.I. ; Orphanos,P. ; Merchant,S.M.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.217-226,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
3.

Conference Proceedings
Conference Proceedings
3. Merged 2.5-V and 3.3-V 0.25-ｦﾌm CMOS technology
Kizilyalli,I.C. ; Huang,R.Y. ; Hwang,D. ; Kane,B.C. ; Ashton,R. ; Kuehne,S. ; Deng,X. ; Twiford,M.S. ; Martin,E.P. ; Shuttleworth,O. ; Wittingham,K. ; Lytle,S. ; Ma,Y. ; Roy,P.K. ; Olmer,L. ; Vaidya,H. ; Li,F. ; Li,X. ; Persson,E. ; Massengale,A.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.175-181,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
4.

Conference Proceedings
Conference Proceedings
4. Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
Kizilyalli,I.C. ; Abein,G. ; Chen,Z. ; Weber,G.R. ; Register,F. ; Harris,E. ; Chetlur,S. ; Higashi,G.S. ; Schofieled,M. ; Sen,S. ; Kotzias,B. ; Roy,P.K. ; Lyding,J.W. ; Hess,K.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.141-146,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506