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Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.233-240, 2005. Pennington, NJ. Electrochemical Society
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Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.691-698, 1993. Pittsburgh, Pa.. Materials Research Society