Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA. pp.39-45, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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EUV, x-ray, and neutron optics and sources : 21-23 July 1999, Denver, Colorado. pp.164-171, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Materials, manufacturing, and measurement for synchrotron radiation mirrors : 30-31 July 1997, San Diego, California. pp.211-220, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.20-31, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.807-813, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.759-764, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.751-758, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA. pp.47-53, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.70-75, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA. pp.600-607, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering