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Conference Proceedings

1. Tailoring of isolation structures with top-surface imaging process by silylation

Kim,H.-G. ; Kim,M.-S. ; Bok,C.-K. ; Park,B.-J. ; Kim,J.-W. ; Baik,K.-H. ; Lee,D.-H.

Pub. info.:	Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 1 pp.554-561, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3333

Conference Proceedings

2. Characteristic study of electron beam stabilization for deep-UV photoresists

Kim,M.-S. ; Choi,J.-H. ; Rho,C.-H. ; Hong,M.-J. ; Jun,B.-J. ; Gil,M.-G. ; Kim,B.-H. ; Ahn,D.-J. ; Ross,M.F. ; Wong,S.S.

Pub. info.:	Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part2 pp.782-792, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3999

Conference Proceedings

3. New robust coding scheme for wireless video transmission based on coefficient sampling

Kim,M.-S. ; Kim,S.-D.

Pub. info.:	Visual communications and image processing 2001 : 24-26 January, 2001, San Jose, USA. pp.614-624, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4310

Conference Proceedings

4. Nature of superconductivity of four-layer HgBa2Ca3Cu4O10+ｦﾄ

Kim,M.-S. ; Lee,S.-I.

Pub. info.:	Superconducting and related oxides, physics and nanoengineering IV : 24-28 April 2000, Orlando, USA. pp.153-160, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4058

Conference Proceedings

5. Vibration control of smart structures featuring piezofilm actuator via discrete-time sliding modes

Choi,S.-B. ; Kim,M.-S.

Pub. info.:	Smart structures and materials 1996 : Mathematics and control in smart structures : 26-29 February 1996, San Diego, California. pp.638-646, 1996. Bellingham. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2715

Conference Proceedings

6. Auto-focus control and weld process monitoring of laser welding using chromatic filtering of thermal radiation (Invited Paper)

Kim,C.-J. ; Baik,S.H. ; Kim,M.-S. ; Chung,C.-M.

Pub. info.:	Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China. pp.388-398, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3550

Conference Proceedings

7. Develop process optimization for CD uniformity improvement

Shin,J.-C. ; Won,J.-I. ; Jung,H.-Y. ; Kim,M.-S. ; Choi,Y.-K. ; Han,O.

Pub. info.:	20th Annual BACUS Symposium on Photomask Technology. pp.540-548, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4186

Conference Proceedings

8. Investigation of electron beam stabilization of 193-nm photoresists

Kim,M.-S. ; Park,J.-W. ; Kim,H.-J. ; Jun,B.-J. ; Gil,M.-G. ; Kim,B.-H. ; Ross,M.F. ; Livesay,W.R.

Pub. info.:	Advances in Resist Technology and Processing XVIII. 4345 pp.737-750, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4345

Conference Proceedings

9. "Novel chemically amplified positive resist containing acetal-type crosslinker of poly(3,3'-dimethoxypropene) for 193-nm top surface imaging process"

Koh,C.-W. ; Jung,J.-C. ; Kim,M.-S. ; Kong,K.-K. ; Lee,G. ; Jung,M.-H. ; Kim,J.-S. ; Shin,K.-S.

Pub. info.:	Advances in Resist Technology and Processing XVIII. 4345 pp.798-803, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4345

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Conference Proceedings

10. Enlargement of holographic stereograms for an architectural perspective presentation

Kim,N. ; Kim,E.-S. ; Kim,M.-S. ; Cho,T.-Y.

Pub. info.:	Practical Holography XII. pp.162-168, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3293

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Author: Kim,M.-S.