1.

Technical Paper
Technical Paper
1. Performance Assessment of Ejector Augmented PDRs
Munipalli,Ramakanth ; Shankar,Vijaya ; Wilson,D.R. ; Kim,H.-Y. ; Lu,F.K. ; Liston,G.
Pub. info.: AIAA paper.  pp.1-10,  2001.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.: 2001
2.

Conference Proceedings
Conference Proceedings
2. Compensation of intrafield registration error caused by process properties in optical lithography
Lee,T.-G. ; Moon,S.-C. ; Lee,H.-M. ; Kim,J.-S. ; Lee,C.-S. ; Kim,H.-Y. ; Park,H.-K.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.365-378,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725