Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 1 pp.336-346, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.971-977, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.792-799, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.958-970, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.997-1004, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Proceedings of the 14th International Modal Analysis Conference February 12-15, 1996 Hyatt Regency Dearborn Hotel Dearborn, Michigan. pp.1251-1257, 1996. Bethel, CT. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Applications of soft computing : 28-29 July 1997, San Diego, California. pp.270-278, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
High Purity Silicon VI : proceedings of the sixth International Symposium. pp.201-208, 2000. Pennington, N.J., Bellingham, Wash.. Electrochemical Society — SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering