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24 results

Conference Proceedings

1. Growth of ZnO Thin Films by Metalorganic Chemical Vapor Deposition Using Isopropyl Alcohol for Oxygen Precursor

Park, J.Y. ; Hong, Y.S. ; Kim, S.S.

Pub. info.:	Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China. pp.998-1001, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	510-511

Conference Proceedings

2. POROUS AMORPHOUS Si FORMATION BY THE ETCHING OF SINGLE CRYSTAL Si SUBSTRATES

George, T. ; Vasquez, R.P. ; Kim, S.S. ; Fathauer, R.W. ; Pike, W.T.

Pub. info.:	Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.415-420, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	259

Conference Proceedings

3. Finite Element Analysis of the Hydro-Mechanical Punching Process

Yoon, J.H. ; Huh, H. ; Lee, Y.S. ; Kim, S.S. ; Kim, E.J. ; Park, H.J. ; Choi, T.H. ; Lee, H.J.

Pub. info.:	Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005. pp.871-876, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	505-507

Conference Proceedings

4. Development of Micro Metal Forming Manufacturing System

Lee, H.J. ; Lee, N.K. ; Lee, S.M. ; Lee, G.A. ; Kim, S.S.

Pub. info.:	Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005. pp.19-24, 2006. Uetikon-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	505-507

Conference Proceedings

5. CONTROL OF CRYSTALLOGRAPHIC AND POINT DEFECTS IN HIGH-DENSITY DYNAMIC RANDOM ACCESS MEMORYDE VICE PROCESSING

Kim, S.S. ; McKee, W.R. ; Pas, M. ; Wijaranakula, W.

Pub. info.:	Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.300-314, 1994. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1994-9

Conference Proceedings

6. Effect of SiGe Layer on Electrical Characteristics of SGI-PDSOI MOSFETs

Choc, T.H. ; Bac, G.J. ; Kim, S.S. ; Rhee, H.S. ; Lee, K.W. ; Lee, N.I. ; Kang, H.S. ; Fujihara, K. ; Kang, H.K. ; Moon, J.T.

Pub. info.:	Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium. pp.349-354, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-3

Conference Proceedings

7. THE EFFECTS OF SURFACE TREATMENT FOR LOW TEMPERATURE SILICON DIOXIDE DEPOSITION ON CADMIUM TELLURIDE

Choi, Seong S. ; Kim, S.S. ; Tsu, D.V. ; Lucovsky, G.

Pub. info.:	Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.313-318, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	131

Conference Proceedings

8. FORMATION OF MULTILAYER SiO2-SiOx HETEROSTRUCTURES BY CONTROL OF REACTION PATHWAYS IN REMOTE PECVD

Tsu, D.V. ; Kim, S.S. ; Theil, J.A. ; Wang, Cheng ; Lucovsky, G.

Pub. info.:	Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A.. pp.209-214, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	165

Conference Proceedings

9. Si(100) SURFACE PREPARATION BY IN-SITU OR IN-VACUO EXPOSURE TO REMOTELY PLASMA-GENERATED ATOMIC HYDROGEN: APPLICATIONS TO DEPOSITED SiO2 AND EPITAXIAL GROWTH OF Si

Yasuda, T. ; Ma, Y. ; Habermehl, S. ; Kim, S.S. ; Lucovsky, G. ; Schneider, T.P. ; Cho, J. ; Nemanich R.J.

Pub. info.:	Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.. pp.395-400, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	202

10.

Conference Proceedings

10. CRYSTALLINE POLYIMIDE THIN FILM DEPOSITION BY IONIZED CLUSTER BEAM

Cho, S.J. ; Choe, H.S. ; Jang, H.G. ; Kim, S.S. ; Whang, C.N.

Pub. info.:	Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.49-54, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	157

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