1.

Conference Proceedings
Conference Proceedings
1. Micromachined microscanners for optical scanning
Kiang,M.-H. ; Solgaard,O. ; Muller,R.S. ; Lau,K.Y.
Pub. info.: Miniaturized systems with micro-optics and micromechanics II : 10-12 February 1997, San Jose, California.  pp.82-90,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3008
2.

Conference Proceedings
Conference Proceedings
2. Actuation of polysilicon surface-micromachined mirrors
Tien,N.C. ; Kiang,M.-H. ; Daneman,M.J. ; Solgaard,O. ; Lau,K.Y. ; Muller,R.S.
Pub. info.: Miniaturized Systems with Micro-Optics and Micromechanics.  pp.53-59,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2687