Morita, H. ; Joo, J.-D. ; Messoussi, R. ; Kawada, K. ; Kim, J.-S. ; Ohmi, T.
Pub. info.:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.143-150, 1997. Pennington, NJ. Electrochemical Society
Ohmi, T. ; Toda, M. ; Katoh, M. ; Kawada, K. ; Morita, H.
Pub. info.:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.3-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society