1.

Conference Proceedings
Conference Proceedings
1. Development of a high-average-power extreme-ultraviolet electric capillary discharge source
Fornaciari,N.R. ; Bender,H. ; Buchenauer,D. ; Kanouff,M.P. ; Karim,S. ; Kubiak,G.D. ; Moen,C.D. ; Shimkaveg,G.M. ; Silfvast,W.T. ; Stewart,K.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.226-231,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
2.

Conference Proceedings
Conference Proceedings
2. Impact of thermal and structural effects on EUV lithographic performance
Ray-Chaudhuri,A.K. ; Gianoulakis,S.E. ; Spence,P.A. ; Kanouff,M.P. ; Moen,C.D.
Pub. info.: Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California.  pp.124-132,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3331
3.

Conference Proceedings
Conference Proceedings
3. Film-stress-induced deformation of EUV reflective optics
Spence,P.A. ; Kanouff,M.P. ; Ray-Chaudhuri,A.K.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.724-734,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
4.

Conference Proceedings
Conference Proceedings
4. Gas curtain for mitigating hydrocarbon contamination of EUV lithographic optical components
Kanouff,M.P. ; Ray-Chaudhuri,A.K.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.735-742,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
5.

Conference Proceedings
Conference Proceedings
5. EUV absorption in a laser-produced plasma source
Kanouff,M.P. ; Shields,H. ; Bernardez,L.J. ; Kubiak,G.D.
Pub. info.: Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA.  pp.507-514,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4343
6.

Conference Proceedings
Conference Proceedings
6. Transient and capillary collisional x-ray lasers
Shlyaptsev,V.N. ; Dunn,J. ; Fournier,K.B. ; Moon,S.J. ; Osterheld,A.L. ; Rocca,J.J.G. ; Detering,F. ; Rozmus,W. ; Matte,J.P. ; Fiedorowicz,H. ; Bartnik,A. ; Kanouff,M.P.
Pub. info.: Soft X-Ray Lasers and Applications IV.  pp.14-22,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4505