1.

Conference Proceedings

Conference Proceedings
Cho, J.-Y. ; Suh, D.-W. ; Kang, J.-H. ; Lee, H.-C.
Pub. info.: Textures of materials : ICOTOM 13 : proceedings of the 13th International Conference on Textures of Materials, Seoul, Korea, August 26-30, 2002.  pp.1239-1244,  2002.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 408-412
2.

Conference Proceedings

Conference Proceedings
Lee, G. ; Kong, K.-K. ; Jung, J.-C. ; Shin, K.-S. ; Kang, J.-H. ; Kim, S.D. ; Choi, Y.-J. ; Choi, S.-J. ; Kim, D.-B. ; Kim, J.-H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.136-140,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
3.

Conference Proceedings

Conference Proceedings
Park, B.C. ; Kang, J.-H. ; Jung, K.Y. ; Song, W.Y. ; O, B. ; Eom, T.B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.935-942,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
4.

Conference Proceedings

Conference Proceedings
Kang, J.-H. ; Oh, S.-K. ; Son, E.-K. ; Kim, J.-W. ; Kim, Y.-H. ; Choi, Y.-J. ; Kim, D.-B. ; Kim, J.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1052-1062,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039