1.

Conference Proceedings
Conference Proceedings
1. Polymer structure modifications for immersion leaching control
S. H. Lee ; J. W. Kim ; S. K. Oh ; C. S. Park ; J. Y. Lee ; S. S. Kim ; J. W. Lee ; D. Kim ; J. Kim ; K. D. Ban ; C. K. Bok ; S. C. Moon
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519
2.

Conference Proceedings
Conference Proceedings
2. Modified polymer architecture for immersion lithography
S. S. Kim ; J. W. Kim ; J. Y. Lee ; S. K. Oh ; S. H. Lee ; J. W. Lee ; D. bae Kim ; J. Kim ; K. D. Ban ; C. K. Bok ; S. Moon
Pub. info.: Advances in resist materials and processing technology XXIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6519