1.

Conference Proceedings
Conference Proceedings
1. Dry release process of anhydrous HF gas-phase etching for the fabrication of a vibrating microgyroscope
Jang,W.I. ; Choi,C.A. ; Hong,Y.S. ; Jun,C.H. ; Kim,Y.T. ; Lee,J.H.
Pub. info.: Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia.  pp.332-339,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3892
2.

Conference Proceedings
Conference Proceedings
2. Surface-micromachined electrostatic diaphragm micropump
Jang,W.I. ; Lee,Y.I. ; Choi,C.A. ; Jun,C.H. ; Kim,Y.T.
Pub. info.: Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia.  pp.395-402,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3891