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16 results

Conference Proceedings

1. EPITAXIAL GROWTH AND STABILITY OF 649 TiSi2 ON Si(111)

Jeon, Hyeongtag ; Honeycutt, J. W. ; Sukow, C. A. ; Humphreys, T. P. ; Nemanich, R. J. ; Rozgonyi, G. A.

Pub. info.:	Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.595-600, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	198

Conference Proceedings

2. HETEROEPITAXIAL GROWTH AND CHARACTERIZATION OF TITANIUM FILMS ON ALPHA (6H) SILICON CARBIDE

Spellman, L. M. ; Glass, R. C. ; Davis, R. F. ; Humphreys, T. P. ; Jeon, Hyeongtag ; Namanich, R. J. ; Chevacharoenkul, Sopa ; Parikh, N. R.

Pub. info.:	Heteroepitaxy of dissimilar materials : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.. pp.99-104, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	221

Conference Proceedings

3. *NUCLEATION AND MORPHOLOGY OF TiSi2 ON Si

Nemanick, R. J. ; Jeon, Hyeongtag ; Sukow, C. A. ; Honeycutt, J, W. ; Rozgonyi, G.,A

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.195-206, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

4. GROWTH AND CHARACTERIZATION OF HETEROEPITAXIAL NICKEL FILMS ON DIAMOND SUBSTRATES

Humphreys, T.P. ; Jeon, Hyeongtag ; Nemanich, R.J. ; Posthill, J.B. ; Rudder, R.A. ; Malta, D.P. ; Hudson, G.C. ; Markunas, R.J. ; Hunn, J.D. ; Parikh, N.R.

Pub. info.:	Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A.. pp.463-468, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	202

Conference Proceedings

5. INTERFACE MORPHOLOGY, NUCLEATION AND ISLAND FORMATION OF TiSi2 ON Si(111)

Jeon, Hyeongtag ; Sukow, C. A. ; Honeycutt, J. W. ; Humphreys, T. P. ; Nemanich, R. J. ; Rozgonyi, G. A.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.559-564, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

6. Amorphous Phase Formation of Titanium Silicide on the 4｡?Off-Axis and On-Axis Si(100) Substrates

Jeon, Hyeongtag ; Lee, Sukjae ; Lee, Hwackjoo ; Ruh, Hyun

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.553-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

Conference Proceedings

7. Atomic layer deposition of Ti/N on Si(100) and (111) substrates

Jeon, Hyeongtag ; Koo, Jae-Hyoung ; Lee, June-Woo ; Kim, Young-Seok ; Kang, K. M. ; Kim, Yang Do ; Kim, Young Do

Pub. info.:	New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.211-, 2000. Warrendale, PA. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	616

Conference Proceedings

8. A Suppression of the Phase Transition and Agglomeration of TiSi2 by Addition of Zr Element

Yoon, Sanghyun ; Jeon, Hyeongtag

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.225-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

9. PHASE TRANSITION AND FORMATION OF TiSi2 CODEPOSITED ON ATOMICALLY CLEAN Si(111)

Jeon, Hyeongtag ; Cho, Y. S. ; Kang, E. Y. ; Park, J. W. ; Nemanich, R. J.

Pub. info.:	Phase transformations in thin films : thermodynamics and kinetics : symposium held April 13-15, 1993, San Francisco, California, U.S.A.. pp.275-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	311

10.

Conference Proceedings

10. TiN Diffusion Barrier Formation by Pulsed Source Chemical Vapor Deposition Method

Jeon, Hyeongtag ; Lee, Sangsoo ; Ahn, Taehang ; Uhm, Jangwoong

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.407-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

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