1.

Conference Proceedings
Conference Proceedings
1. Interferometric measurement for improved understanding of boundary effects in micromachined beams
Jensen,B.D. ; Bitsie,F. ; Boer,M.P.de
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.61-72,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875
2.

Conference Proceedings
Conference Proceedings
2. Small-area in-situ MEMS test structure to measure fracture strength by electrostatic probing
Boer,M.P.de ; Jensen,B.D. ; Bitsie,F.
Pub. info.: Materials and Device Characterization in Micromachining II.  pp.97-103,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3875
3.

Conference Proceedings
Conference Proceedings
3. Microelectromechanical high-density energy storage/rapid release system
Rodgers,M.S. ; AIlen,J.J. ; Meeks,K.D. ; Jensen,B.D. ; Miller,S.L.
Pub. info.: Micromachined Devices and Components V.  pp.212-222,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3876