1.

Conference Proceedings
Conference Proceedings
1. Leakage monitoring and control with an advanced e-beam inspection system [6152-170]
Liu, H. ; Yeh, J. H. ; Yang, C. L. ; Lei, S. C. ; Kao, J. Y. ; Yang, Y. D. ; Tsai, M. ; Tzou, S. F ; Wu, W.-Y ; Wu, H.-C ; Xiao, H. ; Jau, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615249-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. In-line semi-electrical process diagnosis methodology for integrated process window optimization of 65nm and below technology nodes [6152-67]
Lei, M. T. ; Tang, K. H. ; Wang, Y. C. ; Huang, C. H. ; Jeng, C. C. ; Wang, L. K. ; Fang, W. ; Zhao, Y. ; Jau, J. ; Hsia, C. C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521T-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings
Conference Proceedings
3. High-throughput contact critical dimension and gray level value measurement [6152-143]
Xiao, H. ; Fang, W. ; Zhao, Y. ; Huang, M. ; Wang, D. ; Wong, D. ; Jau, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61523L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
4.

Conference Proceedings
Conference Proceedings
4. High-resistance W-plug monitoring with an advance e-beam inspection system [6152-171]
Liu, H. ; Yeh, J. H ; Yang, C. L. ; Lei, S. C. ; Kao, J. Y. ; Yang, Y. D ; Tsai, M. ; Tzou, S. F. ; Wu, W.-Y. ; Wu. H.-C. ; Xiao, H. ; Jau, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61524A-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152