Park, Heemyong ; Ilderem, Vida ; Jasper, Craig ; Kaneshiro, Mike ; Christiansen, Jim ; Jones, Kevin S.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.425-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Jasper, Craig ; Klingbeil, Scott ; Jones, K. S. ; Robinson, H. G.
Pub. info.:
Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A.. pp.337-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Avci, Ibrahim ; Law, Mark E. ; Jasper, Craig ; Rueda, Hernan A. ; Thoma, Rainer
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society