Hall, R. Mark ; Rosato, John J. ; Jarvis, Taura ; Parry, Thad ; Lindquist, Paul G.
Pub. info.:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.127-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.15-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society