1.

Technical Paper

Technical Paper
AI-Qahtani, M. ; Jang, Y.-J. ; Chen, H.-C. ; Han, J.-C.
Pub. info.: A.S.M.E. paper.  2001.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : GT
Ser. no.: 2001
2.

Conference Proceedings

Conference Proceedings
Pieh, S.H. ; Park, B.-H. ; Jang, Y.-J. ; Kim, K.-H. ; Kim, G.-T.
Pub. info.: Optical Microlithography XVII.  pp.1040-1046,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377