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54 results

Conference Proceedings

1. Growth of Epitaxial and γ-Al2O3 Dielectrics on 4H-SiC

Carey M. Tanner ; Jun Lu ; Hans-Olof Blom ; Jane P. Chang

Pub. info.:	Silicon carbide 2006--materials, processing and devices : symposium held April 18-20, 2006, San Francisco, California, U.S.A.. pp.341-346, 2006. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	911

Conference Proceedings

2. (378f) Feature Profile Evolution: From Plasma Etching and Deposition to Surface Roughness Propagation

John Hoang ; Jane P. Chang

Pub. info.:	Conference proceedings : 2009 AIChE annual meeting, Nashvikke, TN, November 8-13 : 09 AIChE annual meeting, Nashville, TN ; Non-topical conferences. pp.165788-, 2009. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-262

Conference Proceedings

3. (711d) Atomic Layer Deposition of AlN Thin Films As Gate Dielectrics for Wide Bandgap Semiconductors

Ya-Chuan Perng ; Jane P. Chang

Pub. info.:	2012 AIChE annual meeting, David L. Lawrence Convention Center, Pittsburgh, PA, October 28 - November 2, 2012 : Conference proceedings. Non-topical conferences. 2012. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-270

Conference Proceedings

4. (711c) Atomic Layer Deposition Enabled Synthesis of Nanostructured Composite BiFeO₃/CoFe₂O₄ Thin Films for Multiferroic Applications

Calvin D. Pham ; Jane P. Chang

Pub. info.:	2012 AIChE annual meeting, David L. Lawrence Convention Center, Pittsburgh, PA, October 28 - November 2, 2012 : Conference proceedings. Non-topical conferences. 2012. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-270

Conference Proceedings

5. (254d) Thermodynamic-Aided Selection of Non-PFC Plasma Chemistries

Nicholas Altieri ; Jack Kun-Chieh Chen ; Luke Minardi ; Jane P. Chang

Pub. info.:	Materials Engineering and Sciences Division 2015 : Core Programming Area at the 2015 AIChE Annual Meeting : Salt Lake City, Utah, USA, 8-13 November 2015. pp.295-295, 2015. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	2015

Conference Proceedings

6. (369d) Predictions of the Etch Behavior of Complex Oxide Films for High-k and Multiferroic Applications

Nathan P. Marchack ; Jack Chen ; Jane P. Chang

Pub. info.:	2012 AIChE annual meeting, David L. Lawrence Convention Center, Pittsburgh, PA, October 28 - November 2, 2012 : Conference proceedings. Non-topical conferences. 2012. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-270

Conference Proceedings

7. (711d) Atomic Layer Deposition of AlN Thin Films As Gate Dielectrics for Wide Bandgap Semiconductors

Ya-Chuan Perng ; Jane P. Chang

Pub. info.:	2012 AIChE annual meeting, David L. Lawrence Convention Center, Pittsburgh, PA, October 28 - November 2, 2012 : Conference proceedings. Non-topical conferences. 2012. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-270

Conference Proceedings

8. (711c) Atomic Layer Deposition Enabled Synthesis of Nanostructured Composite BiFeO₃/CoFe₂O₄ Thin Films for Multiferroic Applications

Calvin D. Pham ; Jane P. Chang

Pub. info.:	2012 AIChE annual meeting, David L. Lawrence Convention Center, Pittsburgh, PA, October 28 - November 2, 2012 : Conference proceedings. Non-topical conferences. 2012. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-270

Conference Proceedings

9. 204f. Effect of Yb³⁺ Co-Doping on the Luminescent Properties of Er³⁺:Y₂O₃ Thin Films

John Hoang ; Jane P. Chang

Pub. info.:	AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences. pp.P135316-, 2008. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-255

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Conference Proceedings

10. 310e. Simulation of Profile Evolution In Shallow Trench Formation by Plasma Etching

John Hoang ; Jane P. Chang

Pub. info.:	AIChE annual meeting, Philadelphia 100 : conference proceedings : 1908 to 2008 : 2008 AIChE annual meeting, Philadelphia, PA, November 16-21, 2008. Non-topical conferences. pp.P135313-, 2008. New York. American Institute of Chemical Engineers
Title of ser.:	AIChE Conference Proceedings
Ser. no.:	P-255

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Author: Jane P. Chang