1.

Conference Proceedings
Conference Proceedings
1. CMOS-compatible surface-micromachined pressure sensor for aqueous ultrasonic application
W.P. Eaton ; J.H. Smith
Pub. info.: Smart structures and materials 1995 : Smart electronics : 2-3 March 1995, San Diego, California.  pp.258-265,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2448
2.

Conference Proceedings
Conference Proceedings
2. Micromachined sensor and actuator research at the Microelectronics Development Laboratory
J.H. Smith ; C.C. Barron ; J.G. Fleming ; S. Montague ; J.L. Rodriguez
Pub. info.: Smart structures and materials 1995 : Smart electronics : 2-3 March 1995, San Diego, California.  pp.152-157,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2448