1.

Conference Proceedings
Conference Proceedings
1. Polarization-dependent proximity effects
J. K. Tyminski ; T. Matsuyama ; T. Nakashima ; T. Schmoeller ; J. Lewellen
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. The impact of scanner model vectorization on optical proximity correction
J. K. Tyminski ; T. Nakashima ; Q. Zhang ; T. Matsuyama ; K. Lucas
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
3.

Conference Proceedings
Conference Proceedings
3. The impact of illuminator signatures on optical proximity effects
J. K. Tyminski ; S. P. Renwick
Pub. info.: Lithography Asia 2008.  2  pp.71402A-1-71402A-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140
4.

Conference Proceedings
Conference Proceedings
4. Modeling scanner signatures in the context of OPC
Q. Zhang ; J. K. Tyminski ; K. Lucas
Pub. info.: Photomask technology 2007.  3  pp.673056-1-673056-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
5.

Conference Proceedings
Conference Proceedings
5. Scanner-characteristics-aware OPC modeling and correction
J. K. Tyminski ; Q. Zhang ; K. Lucas ; L. Depre ; P. VanAdrichem
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521