N. G. Orji ; R. G. Dixson ; B. D. Bunday ; J. A. Allgair
Pub. info.:
Metrology, inspection, and process control for microlithography XXII. 1 pp.692208-1-692208-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
N. G. Orji ; R. G. Dixson ; B. D. Bunday ; J. A. Allgair
Pub. info.:
Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA. pp.70420A-1-70420A-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering