1.

Conference Proceedings
Conference Proceedings
1. The possibility of CrOx as the top coating material on a MoSi HT [5992-127]
Harashima, N. ; Iso, H. ; Isozaki, T. ; Uneo, N. ; Sasaki, T.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59923R-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings
Conference Proceedings
2. New structure of ArF high-transmittance attenuated phase-shifting mask with dry etching process
Iso, H. ; Harashima, N. ; Isozaki, T. ; Kanai, S. ; Sasaki, T.
Pub. info.: 24th Annual BACUS Symposium on Photomask Technology.  pp.968-973,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5567