Dou, K. ; Irwin, B. ; Parkhill, R.L. ; Knobbe, E.T.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.492-496, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hargrave, B. ; Irwin, B. ; Parkhill, R. ; Church, K.H. ; Nguyen, M.N. ; Kachurin, A. ; Warren, W.L.
Pub. info.:
Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA. pp.114-125, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
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