Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
Pub. info.:
Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.. pp.101-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Imafuku, D. ; Mizubayashi, W. ; Miyazaki, S. ; Hirose, M. ; Wakayama, Y. ; Kobayashi, S.
Pub. info.:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.161-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society