Ikari, A. ; Haga, H. ; Yoda, O. ; Uedono, A. ; Ujihira, Y.
Pub. info.:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.69-74, 1992. Pittsburgh, Pa.. Materials Research Society
Muller, T. ; Siebert, W. ; Messmann, K. ; Wablich, R. ; Krottenthaler, P. ; Hoelzl, R. ; Ikari, A. ; von Ammon, W.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.194-208, 2002. Pennington, NJ. Electrochemical Society
Muller, T. ; Siebert, W. ; Messmann, K. ; Wablich, R. ; Krottenthaler, P. ; Hoelzl, R. ; Ikari, A. ; von Ammon, W.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.194-206, 2002. Pennington, NJ. Electrochemical Society